Device for analyzing a surface layer by means of ion scattering

Details Device for analyzing a surface layer by means of ion scattering Device for analyzing a surface layer by means of ion scattering

1976-11-01

1978-07-11

Willis, Davis L.

Radiant energy

Electron energy analysis

250310, H01J 3900

Patent

active

041004094

ABSTRACT:
A device for analysing a surface layer by means of ion scattering. The device comprises an energy selector having two coaxial cylindrical electrodes. A primary mono-energetic ion beam impinges upon the surface layer and its axis coincides with the axis of the cylindrical electrodes. Back-scattered ions, the paths of which lie on a conical surface having an apical angle of 180.degree. reduced with the scattering angle, are selected for energy and detected.

REFERENCES:
patent: 3445708 (1969-05-01), Webster
patent: 3517191 (1970-06-01), Liebl
patent: 3609352 (1971-09-01), Harris
patent: 3739170 (1973-06-01), Bohen et al.
patent: 3783280 (1974-01-01), Watson
patent: 3805057 (1974-04-01), Yanagisawa

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