Device for adjusting projection magnification

Details Device for adjusting projection magnification Device for adjusting projection magnification

1986-05-29

1987-06-30

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Focus or magnification control

355 53, G03B 2752

Patent

active

046766316

ABSTRACT:
A device for adjusting projection magnification of a projection lens usable in a process of manufacture of semiconductor devices to project an image of a pattern of a reticle onto a semiconductor wafer. The device includes at least one plane glass plate to form a substantially closed space at the semiconductor wafer side of the projection lens system. Pressure in the space is controlled to control deformation of the glass plate to thereby adjust the projection magnification.

REFERENCES:
patent: 4084903 (1978-04-01), Pircher
patent: 4298273 (1981-11-01), Nishizuka et al.
patent: 4477183 (1984-10-01), Kawamura et al.
patent: 4496239 (1985-01-01), Isohata et al.
patent: 4506977 (1985-03-01), Sato et al.
patent: 4537498 (1985-08-01), Banks et al.
patent: 4583840 (1986-04-01), Yabu et al.

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