Device comprising a flat susceptor rotating parallel to a refere

Details Device comprising a flat susceptor rotating parallel to a refere Device comprising a flat susceptor rotating parallel to a refere

1987-03-16

1989-08-29

Beck, Shrive

Coating apparatus

Work holders, or handling devices

118730, 406 87, 406 88, 406 92, 108138, B05C 1100

Patent

active

048606871

ABSTRACT:
A device comprising a flat susceptor rotating parallel to a reference surface about a rotary shaft perpendicular to this surface and comprising means for obtaining the stability of the susceptor held in sustentation and means for obtaining its rotary movement, is characterized in that these means are constituted by the structure of the susceptor, of the rotary shaft and of the reference surface, which cooperate with each other under the action of one or several flow of gas.

REFERENCES:
patent: 3332656 (1967-07-01), Johnson, Jr. et al.
patent: 3721210 (1973-03-01), Helms et al.
patent: 3730134 (1973-05-01), Kadi
patent: 3783822 (1974-01-01), Wollam
patent: 3822652 (1974-07-01), Burdick et al.
patent: 4242038 (1980-12-01), Santini et al.
patent: 4275282 (1981-06-01), Miller
patent: 4386255 (1983-05-01), Berkman et al.
patent: 4403567 (1983-09-01), daCosta et al.
patent: 4512391 (1985-04-01), Harra
patent: 4690591 (1987-09-01), Nagashima et al.
Von Burg et al., "Orienting Bernoulli Effect Wafer Transfer Mechanism", IBM Tech. Disc. Bulletin, Nov. 1975, pp. 1836-1837.
Sacco et al., "Pedestal Orienter", IBM Tech. Disc. Bulletin, Jan. 1976, pp. 2529-2530.
O'Neill et al., "Annular Orientor", IBM Tech. Disc. Bulletin, Jul. 1977, pp. 593-594.

Affiliated with

Also associated with

Rating

Device comprising a flat susceptor rotating parallel to a refere does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device comprising a flat susceptor rotating parallel to a refere, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device comprising a flat susceptor rotating parallel to a refere will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2231252