Device and process of forming device with device structure...

Active solid-state devices (e.g. – transistors – solid-state diode – Specified wide band gap semiconductor material other than...

Reexamination Certificate

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C257SE29082, C257SE21051, C438S105000

Reexamination Certificate

active

07858989

ABSTRACT:
A graphene-based device is formed with a substrate having a trench therein, a device structure on the substrate and within the trench, a graphene layer over the device structure, and a protective layer over the graphene layer. Fabrication techniques include forming a trench in a substrate, forming a device structure within the trench, forming a graphene layer over the device structure, and forming a protective layer over the graphene layer.

REFERENCES:
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Claire Berger, Zhimin Song, Tianbo Li, Xuebin Li, Asmerom Y. Ogbazghi, Rui Feng,Zhenting Dai, Alexei N. Marchenkov, Edward H. Conrad, Phillip N. First, and Walt A. De Heer; “Ultrathin Epitaxial Graphite: 2D Electron Gas Properties and a Route toward Graphene-based Nanoelectronics”;J. Phys. Chem. B2004, 108, pp. 19912-19916.
K. S. Novoselov et al.; “Electric Field Effect in Atomically Thin Carbon Films”; Science 306. pp. 666-609 (2004); DOI: 10.1126/science.1102896; Oct. 22, 2004 vol. 306 Science.
Scott Gilje, Song Han, Minsheng Wang, Kang L. Wang, and Richard B. Kaner; “A Chemical Route to Graphene for Device Applications”; Nano Letters, 2007, vol. 7 No. 11, pp. 3394-3398.

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