Coating apparatus – Gas or vapor deposition – Means to coat or impregnate particulate matter
Patent
1989-11-30
1991-02-12
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Means to coat or impregnate particulate matter
118715, 118719, 118723, 118725, C23C 1600
Patent
active
049915410
ABSTRACT:
A device for treating fine particles is provided which comprises a plural number of reaction chambers for providing reaction fields different from each other provided along the flow pathway on the downstream side of a nozzle which jets out fine particles in a beam. The device may be provided with a chamber for a starting material for forming fine particles. The nozzle may be a convergent-divergent nozzle.
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Ando Kenji
Den Tohru
Kamiya Osamu
Kurihara Noriko
Sugata Hiroyuki
Bueker Richard
Canon Kabushiki Kaisha
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