Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate
2005-02-22
2005-02-22
Stinson, Frankie L. (Department: 1746)
Cleaning and liquid contact with solids
Processes
With work or work parts movable during treatment
C134S034000, C134S902000, C438S745000, C216S096000
Reexamination Certificate
active
06858092
ABSTRACT:
A device for liquid treatment of a defined area of a wafer-shaped article, especially of a wafer, near the edge, in which the liquid is applied to a first surface, flows essentially radially to the outside to the peripheral-side edge of the wafer-shaped article and around this edge onto the second surface, the liquid wetting a defined section near the edge on the second surface and thereupon being removed from the wafer-shaped article.
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Perrin Joseph L.
Sez AG
Stinson Frankie L.
LandOfFree
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