Optics: measuring and testing – Range or remote distance finding – With photodetection
Reexamination Certificate
2006-05-09
2006-05-09
Tarcza, Thomas H. (Department: 3662)
Optics: measuring and testing
Range or remote distance finding
With photodetection
C356S003010, C356S005010, C356S237600, C356S239200, C356S369000
Reexamination Certificate
active
07042556
ABSTRACT:
A method and a device to detect subsurface three-dimensional micro-structure in a sample by illuminating the sample with light of a given polarization and detecting light emanating from the sample that has a different direction of polarization by means of a confocal optical system.
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H. R. Hee, et al. “Optical Coherence Tomography for Ophthalmic Imaging”, IEEE Engineering in Medicine and Biology, 95 Sun ,et al., “Application. of Optical Scattering Methods to Detect Damage in Ceramics”, in Machining of Ceramics and Composites, Part IV; Chapter 19, edited by Jahanmir et al., in 1999, 1t 669.
Zhang et al., “Subsurface Damage Measurement In Silicon Wafers By Laser Scattering”, in Transactions of NAMSI/SME, vol. XXX, 2002, at 535.
Dobbs Micahel J.
Gottlieb Paul A.
Lally Brian J.
Ratcliffe Luke
Tarcza Thomas H.
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