Coherent light generators – Particular beam control device
Reexamination Certificate
2006-06-05
2008-10-07
Nguyen, Dung T (Department: 2828)
Coherent light generators
Particular beam control device
C372S057000, C372S107000
Reexamination Certificate
active
07433372
ABSTRACT:
A beam mixer for increasing intensity symmetry along a selected axis of a beam (wherein the beam extends from a first edge to a second edge along the axis) is disclosed and may include a plurality of mirrors establishing a spatially inverting path. For the beam mixer, the inverting path may have a beginning and an end and may be characterized in that a part of the beam near the first beam edge at the beginning of the path translates to the second beam edge at the end of the path. For this aspect, the beam mixer may further include an optic dividing the beam into first and second beam portions, the optic placing the first portion onto the inverting path and recombining the first and second portions onto a common path after the first portion has traveled along the inverting path thereby mixing the beam.
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patent: 2004/0136417 (2004-07-01), Webb et al.
patent: 2004/0182838 (2004-09-01), Das et al.
patent: 2005/0259709 (2005-11-01), Das et al.
U.S. Appl. No. 11/261,948, filed Oct. 28, 2005, Das et al.
U.S. Appl. No. 11/447,379, filed Jun. 5, 2006, Hofmann.
U.S. Appl. No. 60/811,242, filed Jun. 5, 2006, Reiley et al.
Cymer Inc.
Hillman Matthew K.
Nguyen Dung T
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