Device and method of manufacturing the same and semiconductor de

Details Device and method of manufacturing the same and semiconductor de Device and method of manufacturing the same and semiconductor de

1994-09-12

1996-07-30

Crane, Sara W.

Active solid-state devices (e.g., transistors, solid-state diode

Bipolar transistor structure

With specified electrode means

257197, 257383, 257770, A01L 27082

Patent

active

055414443

ABSTRACT:
A device having, at least, a first film having a surface on which neither a natural oxide film nor impurity grains caused by a resist residue is or are present, and a conductive material layer formed on a surface adjacent to the surface of the first film, wherein an insulative compound film is formed on a surface of the conductive material layer by a surface reaction with the conductive material layer, and a predetermined second film required for an arrangement is formed on the surface of the first film.

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Sopher, R. P., et al. "Metal Contacts to Semiconductor Devices" IBM Tech Disc Bull vol. 10, No. 2, Jul. 1967 pp. 158-59.

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