Cleaning and liquid contact with solids – Processes – Work handled in bulk or groups
Patent
1997-05-23
1999-09-21
Stinson, Frankie L.
Cleaning and liquid contact with solids
Processes
Work handled in bulk or groups
134135, 134145, 134153, 211 4117, B08B 302
Patent
active
059540680
ABSTRACT:
A device for treatment of substrates in a fluid container includes a container containing a treatment fluid and a substrate transport device moveable into a position above the container. The substrate transport device has at least one substrate holding device for securing the substrates in a first position and releasing the substrates in a second position. A third position may be provided in which a first set of substrates is secured and a second set of substrates is released. The substrate holding device is preferably at least one rotatable securing rod.
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Cornelissen Ingrid
Meuris Marc
Weber Martin
IMEC vzw
Steag MicroTech GmbH
Stinson Frankie L.
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