Device and method for transporting wafer-shaped articles

Details Device and method for transporting wafer-shaped articles Device and method for transporting wafer-shaped articles

2007-09-18

2007-09-18

Underwood, Donald (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

Transporting means is a horizontally rotated arm

C414S222010, C414S416030, C414S416080, C414S941000

Reexamination Certificate

active

10531419

ABSTRACT:
An apparatus for treating wafer-shaped articles includes at least one linear arranged array of a plurality of at least two process units wherein in each such process unit one single wafer-shaped article can be treated, a cassette-holding unit for holding at least one cassette storing at least one wafer-shaped article therein and a transport system for picking a wafer-shaped article from a cassette and placing it into one of a process unit. The apparatus has a transport unit movably mounted on a linear track. The transport unit includes at least one holding member for holding a single wafer-shaped article in a substantially vertical plane parallel to the linear track.

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