Device and method for the harmonized positioning of wafer disks

Details Device and method for the harmonized positioning of wafer disks Device and method for the harmonized positioning of wafer disks

2007-10-30

2007-10-30

Mackey, Patrick (Department: 3652)

Material or article handling

Article reorienting device

Article frictionally engaged and rotated by relatively...

C414S433000, C414S754000, C414S816000, C414S936000, C198S394000, C901S030000

Reexamination Certificate

active

10483548

ABSTRACT:
A device for aligning a plurality of vertically arranged (upright) disks (20), especially wafer disks during the fabrication of semiconductor chips. Two mounting or bearing elements (30, 32) respectively have individually mounted guide rollers (34) positioned next to each other for each disk position. A drive device (40, 42; 50, 60; 240, 242) is for rotating the disks in relation to their azimuthal positions. A device (80) is provided for detecting the azimuthal positions of notches or indentations (22) arranged in the outer circumference in the disks (20). A device is provided for controlling the drive with the signals of the detection device (80) for detecting the azimuthal positions of the notches (22). The drive for rotating the disks in relation to their azimuthal positions has an individually driven drive roller element (42) for each disk (20) mounted on the stationary axis. In one embodiment, the drive roller elements, via a plurality of transmission rollers, can be selectively coupled to a driven roller (60) with the aid of the actuator elements. In a second embodiment, the first drive roller is individually driven by a plurality of individually controlled drive elements (240).

REFERENCES:
patent: 4662811 (1987-05-01), Hayden
patent: 4813840 (1989-03-01), Prabhakar et al.
patent: 5028200 (1991-07-01), Shimane
patent: 5125240 (1992-06-01), Knippscheer et al.
patent: 5183378 (1993-02-01), Asano et al.
patent: 5383759 (1995-01-01), Lin
patent: 5533243 (1996-07-01), Asano
patent: 5551829 (1996-09-01), Jerolimov et al.
patent: 5662452 (1997-09-01), Allison
patent: 5853284 (1998-12-01), Ohzeki et al.
patent: 5970818 (1999-10-01), Kikuchi et al.
patent: 6052913 (2000-04-01), Kaneko et al.
patent: 6222339 (2001-04-01), Yamasaki et al.
patent: 6554560 (2003-04-01), Sinha
patent: 0 376 160 (1990-07-01), None

Affiliated with

Also associated with

Rating

Device and method for the harmonized positioning of wafer disks does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device and method for the harmonized positioning of wafer disks, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device and method for the harmonized positioning of wafer disks will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3843763