Device and method for substrate displacement detection

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

Reexamination Certificate

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C324S758010

Reexamination Certificate

active

06992493

ABSTRACT:
Disclosed is an apparatus and method for detecting positional displacement of a board. A board20having a surface formed with a conductive pattern25is transferred in a direction A while supplying an AC signal from a power supply section3to the surface of the board. The level of positional displacement of the board is detected in accordance with the transfer speed of the board and the difference between the timings of the intermediate signal levels generated when the AC signal is sensed by a pair of position sensors1, 2opposed to the leading edge of the board. The present invention allows positional displacement of the board to be detected in a simple non-contact structure while maintaining a high degree of accuracy without variation over time.

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