Device and method for separating and collecting halide gas

Gas separation: processes – Selective diffusion of gases – Selective diffusion of gases through substantially solid...

Reexamination Certificate

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C095S047000, C096S008000, C096S009000, C096S010000, C096S014000

Reexamination Certificate

active

06921428

ABSTRACT:
A halide gas separating and collecting device for separating and collecting halide gas from mixed gas containing the halide gas, wherein at least first and second stage separating membrane modules are stacked in multiple stages. The method comprises: feeding the mixed gas to the inlet of the first stage separating membrane module, feeding the gas passed through the previous separating membrane module to the inlets of the second and subsequent stage separating membrane modules, recycling the gas unpassed through the second and subsequent stage separating membrane modules to the inlet of the first stage separating membrane module, and controlling the flow of gas unpassed through the first stage separating membrane module by a control valve connected to the unpassed gas outlet of the first stage separating membrane module, whereby the halide gas can be separated and collected as unpassed gas at a high density and a high collection rate.

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