Device and method for positioning a notched wafer

Details Device and method for positioning a notched wafer Device and method for positioning a notched wafer

1997-09-16

1998-12-22

Krizek, Janice L.

Material or article handling

Article reorienting device

Orienter has article gripping means

414936, B65G 4724

Patent

active

058511024

ABSTRACT:
A detector is provided to optically monitor the outer periphery of a wafer rotated by rotation of a rotary stage, so as to detect how much the center of the wafer placed on the rotary inspection stage is offset from the rotational center of the rotary stage as well as an angular position, on the stage, of a V-shaped notch formed in the wafer. From the detected eccentricity of the wafer, it is determined whether a precise positioning operation, using at least three positioning pins, to locate the center of the wafer at the rotational center of the rotary stage should be performed or not. When the detected eccentricity is so great as to necessitate the precise positioning operation, one of the positioning pins is caused to fit into the V-shaped notch of the wafer on the basis of the detected angular position of the notch and then the precise positioning of the wafer is performed using the other two positioning pins. In this manner, the wafer can be properly positioned so that the center of the wafer lies exactly at the rotational center of the rotary stage, using the at least three positioning pins.

REFERENCES:
patent: 4685206 (1987-08-01), Kobayashi et al.
patent: 4887904 (1989-12-01), Nakazato et al.
patent: 4938654 (1990-07-01), Schram
patent: 5125791 (1992-06-01), Volovich
patent: 5308222 (1994-05-01), Bacchi et al.

Affiliated with

Also associated with

Rating

Device and method for positioning a notched wafer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device and method for positioning a notched wafer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device and method for positioning a notched wafer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2040561