Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2008-07-29
2008-07-29
Bueker, Richard (Department: 1792)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C392S386000
Reexamination Certificate
active
07404862
ABSTRACT:
A device and a method for facilitating the deposition and patterning of organic materials onto substrates utilizing the vapor transport mechanisms of organic vapor phase deposition is provided. The device includes one or more nozzles, and an apparatus integrally connected to the one or more nozzles, wherein the apparatus includes one or more source cells, a carrier gas inlet, a carrier gas outlet, and a first valve capable of controlling the flow of a carrier gas through the one or more source cells. The method includes moving a substrate relative to an apparatus, and controlling the composition of the organic material and/or the rate of the organic material ejected by the one or more nozzles while moving the substrate relative to the apparatus, such that a patterned organic layer is deposited over the substrate.
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Supplementary European Search Report from EP 0 277 0461 dated Jun. 12, 2007.
Benzinger Jay B.
Forrest Stephen R.
Shtein Max
Bueker Richard
Kenyon & Kenyon LLP
The Trustees of Princeton University
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