Device and method for monitoring process exhaust gas,...

Details Device and method for monitoring process exhaust gas,... Device and method for monitoring process exhaust gas,...

2005-09-13

2005-09-13

Lebentritt, Michael (Department: 2812)

Coating processes

Measuring, testing, or indicating

C438S014000

Reexamination Certificate

active

06942891

ABSTRACT:
Process exhaust gas is sampled, and the components of the process exhaust gas are analyzed by a Fourier-transform infrared spectroscope (FT-IR) (26). The analysis result is compared with a reference analysis result obtained from an analysis of process exhaust gas generated in an operation performed under reference process conditions. If the amount of a gas component changes to an amount that is outside a predetermined range set around a reference value obtained from the reference analysis result, a signal indicating a process error is outputted. Instead of the output of the signal indicating a process error, the process conditions can be automatically adjusted.

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