Device and method for measuring thickness

Details Device and method for measuring thickness Device and method for measuring thickness

2007-04-17

2007-04-17

Williams, Hezron (Department: 2856)

Measuring and testing

Vibration

Resonance, frequency, or amplitude study

C073S655000, C073S659000

Reexamination Certificate

active

11368095

ABSTRACT:
A device for measuring thickness of an object has a vibration generator for generating vibrations in the object, a vibration detector for detecting vibrations generated in the object by the vibration generator and a frequency analyzer for calculating resonance frequency of the object. The vibration generator includes a light-emitting part which emits light towards the object to irradiate and to be absorbed by the object. A plurality of vibration detectors may be used and the frequency analyzer may include a sound speed analyzer for calculating speed of sound inside the object from vibrations detected by these plurality of vibration detectors.

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T. Sawada,Photothermal Spectroscopy and Its Applications, Japanese Society of Spectroscopy.

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