Device and method for measuring a characteristic of an optical e

Details Device and method for measuring a characteristic of an optical e Device and method for measuring a characteristic of an optical e

1997-04-07

1998-06-16

Voeltz, Emanuel Todd

Boots, shoes, and leggings

356355, 356363, 356359, G01B 902, G01B 1124, G01B 1100, G01M 1100

Patent

active

057681503

ABSTRACT:
A device for measuring a characteristic of an optical element which forms an interference fringe pattern using a reference light beam reflected from a reference surface and a test light beam that is guided from the optical element by a light refracting element. The interference fringe pattern is detected and data corresponding to the interference fringe pattern is output. The outputted data is processed such that information of wave front aberration representative of the interference fringe pattern is output. The information includes mathematical terms representative of position errors and of the characteristic of the optical element. The mathematical terms are calculated, and the mathematical terms representative of the characteristic of the optical element are corrected based on a value of at least one of the mathematical terms representative of the position errors. The corrected mathematical terms are then displayed.

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