Device and method for load locking for semiconductor processing

Details Device and method for load locking for semiconductor processing Device and method for load locking for semiconductor processing

1999-02-09

2000-04-25

Olszewski, Robert P.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414805, 414937, 414939, 414941, B65G 106

Patent

active

060536861

ABSTRACT:
There is provided a load-lock device which allows high productivity and occupies a small space. There is provided a load-lock device which stands by with objects to be processed loaded thereon in order to cooperate with a transport mechanism in transporting the objects to be processed to processing chambers in order. The load-lock device according to the present invention comprises chamber means, wafer holding means for loading a plurality of the objects to be processed which is movable up and down in the chamber and flange means provided on a side of the wafer holding means which is engaged with a part of an inner wall of the chamber to divide the space inside the chamber into two isolated rooms. The transport mechanism is connected to a side of the chamber means substantially in the center thereof, and the flange means is coupled to the side of the wafer holding means substantially in the center thereof. The flange means includes sealing means which is engaged with a part of the inner wall of the chamber to achieve complete sealing. The load-lock device according to the invention allows a gate valve between the transport mechanism and the load-lock device to be removed to double the efficiency of the prior art at least.

REFERENCES:
patent: 3874525 (1975-04-01), Hansen et al.
patent: 4400125 (1983-08-01), Jensen
patent: 4892455 (1990-01-01), Hine
patent: 5183547 (1993-02-01), Ikeda
patent: 5223001 (1993-06-01), Saeki
patent: 5879128 (1999-03-01), Tietz et al.

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