Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-03-20
2011-12-13
Glick, Edward (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
08077289
ABSTRACT:
The disclosure relates to a device and a method for influencing the polarization distribution in an optical system, in particular in a microlithographic projection exposure apparatus. A device according to the disclosure includes a plurality of polarization-influencing optical elements which are arranged in a common plane in such a way that they can be moved independently of each other.
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Asfaw Mesfin T
Carl Zeiss SMT GmbH
Fish & Richardson P.C.
Glick Edward
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