Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1999-07-12
2000-06-06
Paik, Sang
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
118715, 118725, H05B 368, C23C 1600
Patent
active
060721626
ABSTRACT:
A device for heating a substrate comprises a heating plate for heating a to-be-treated substrate, substrate holding section for holding the to-be-treated substrate on the heating plate, a gas stream producing section for producing a gas stream in a space above the heating plate in one direction along a surface of the heating plate, and a heater provided at the heating plate, and having pattern symmetrical with respect to a gas stream flowing through the center of the heating plate, wherein the heater comprises a first heater constituting section having heater elements arranged in the form of a ring, and a second heater constituting section located inside the first heater constituting section and having heater elements which are arranged so that more heat is generated in an upstream side of the gas stream than in a downstream side thereof.
REFERENCES:
patent: 4332833 (1982-06-01), Aspnes et al.
patent: 5177878 (1993-01-01), Visser
patent: 5226056 (1993-07-01), Kilkuchi et al.
patent: 5290381 (1994-03-01), Nozawa et al.
patent: 5294778 (1994-03-01), Carman et al.
Ito Shin'ichi
Okumura Katsuya
Kabushiki Kaisha Toshiba
Paik Sang
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