Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2007-01-09
2007-01-09
Chen, Bret (Department: 1762)
Coating apparatus
Gas or vapor deposition
With treating means
C156S345360, C313S567000, C313S231310, C216S069000
Reexamination Certificate
active
09831722
ABSTRACT:
Device for producing a plasma, in particular for treating surfaces, for chemically reacting gases, or for producing light, by way of microstructure electrode discharges, using a device for producing plasma having at least one guide structure. A microwave generator which can be used to launch microwaves into the guide structure. The guide structure has a locally narrowly limited plasma region in contact with a gas. The guide structure is preferably a metallic waveguide filled with a dielectric material, or an arrangement of strip lines which run on a dielectric plate. The device and the method are particularly suited for processing or activating surfaces or for depositing layers on a substrate.
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Grosse Stefan
Voigt Johannes
Chen Bret
Kenyon & Kenyon LLP
Robert & Bosch GmbH
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