Device and method for examining the smoothness of a sample surfa

Details Device and method for examining the smoothness of a sample surfa Device and method for examining the smoothness of a sample surfa

1998-02-18

2000-10-03

Rosenberger, Richard A.

Optics: measuring and testing

With plural diverse test or art

356371, 3562372, G01N 2188

Patent

active

061280739

ABSTRACT:
A device for examining the smoothness of a sample surface includes a scattered-light instrument for scanning the surface with a focused laser beam and for detecting scattered light which is reflected during the scanning of the surface. There is also an instrument for microscopic examination of prominently light-scattering regions of the surface after they have been identified using the scattered-light instrument. This device has an evacuable sample chamber, in which the sample is placed on a sample holder and which has a transparent window through which the laser beam passes before it strikes the surface of the sample. There is also a method for examining a sample using the device.

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H. Rothe, A. Vasper, SPIE's Annual Meeting '96, Denver, Aug. 4-9, Proc. S No. 2862-06.

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