Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-11-27
2010-06-15
Barnes-Bullock, Crystal J (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S100000, C700S104000, C700S112000, C700S218000, C700S228000, C156S345320, C204S298250
Reexamination Certificate
active
07738987
ABSTRACT:
Depending on the degree of microfabrication requested for each wafer lot, transfer of wafers is controlled. A substrate processing apparatus includes a plurality of PMs400and an LLM500and is controlled by an EC200.The EC200includes a selection unit255and a transfer control unit260.The unit255selects the PM to which the next wafer is to be transferred, and selects, for each lot, whether the wafers are transferred to the same PM in one-lot units or in one-substrate units depending on the degree of the microfabrication requested for each lot. When the wafer transfer in lot units is selected, the unit260sequentially transfers the wafers included in the lot to the selected PM. Otherwise the unit260sequentially OR transfers the wafers included in the lot from the selected PM to a different PM one by one.
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Barnes-Bullock Crystal J
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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