Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Patent
1991-04-29
1995-05-02
Breneman, R. Bruce
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
With means for measuring, testing, or sensing
C30B 3500
Patent
active
054109833
ABSTRACT:
A crystal growth device is disclosed comprising a crucible in the cavity of which a crystallization reaction may take place to make possible the automatic and accurate observation of crystallization in miniaturized installation.
REFERENCES:
patent: 4508970 (1985-04-01), Ackerman
patent: 4886646 (1989-12-01), Carter et al.
patent: 4919899 (1990-04-01), Hermann et al.
patent: 4969745 (1990-11-01), Ibe
Journal of Crystal Growth, vol. 73, No. 2, Nov., 1985, pp. 364-368, R. F. Karlicek et al., "Remote Optical Monitoring of Reactants in a Vapor Phase Epitaxial Reactor."
Breneman R. Bruce
Garrett Felisa
Societe Anonyme dite: Aerospatiale Societe Nationale
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