Optical waveguides – Integrated optical circuit
Reexamination Certificate
2007-02-23
2008-08-26
Pak, Sung (Department: 2874)
Optical waveguides
Integrated optical circuit
C385S130000, C385S131000, C438S029000, C438S031000, C438S041000, C216S002000, C257S432000
Reexamination Certificate
active
07418166
ABSTRACT:
Optical devices having integrated waveguide and active areas are realized using a crystallization approach involving the inhibition of defects typically associated with liquid-phase crystalline growth of lattice mismatched materials. According to one example embodiment, a growth region is formed such that the region is isolated from a silicon portion of silicon material. The region extends from a silicon-based seeding area of the substrate. A semiconductor material is deposited on a Silicon-based seeding area and in the growth region. A single crystalline material is formed from the deposited semiconductor material by heating and cooling the deposited semiconductor material while directing growth of the semiconductor material from the Silicon-based seeding area and through an opening sufficiently narrow to mitigate crystalline defects. A light-communicating device is formed by etching the silicon material over an insulator layer and etching the single crystalline material.
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Kapur Pawan
Kuo Yu-Hsuan
Miller David A. B.
Wiemer Michael West
Crawford & Maunu PLLC
Pak Sung
Petkovsek Daniel
The Board of Trustees of the Leland Stanford Junior University
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