Device and a process for the calibration of a semiconductor...

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

Reexamination Certificate

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C324S754090

Reexamination Certificate

active

11167930

ABSTRACT:
A device and a process for the calibration of a semi-conductor component test systemThe invention relates to a process and a device for the calibration of a probe card and/or of a semi-conductor component test apparatus including a first connection, at which a corresponding signal, in particular a calibration signal can be applied, and a second connection, connected or connectable with the first connection, at which the signal, in particular the calibration signal, can be emitted, and a third connection, at which a corresponding further signal, in particular a calibration signal, can be applied, and a fourth connection, connected or connectable with the third connection, at which the further signal, in particular the calibration signal, can be emitted.

REFERENCES:
patent: 6622103 (2003-09-01), Miller
patent: 7061227 (2006-06-01), Bucksch et al.
patent: 19922907 (1999-12-01), None
patent: 10141025 (2003-03-01), None
patent: 10056882 (2003-06-01), None
patent: 10330043 (2005-02-01), None
patent: 2002-107438 (2002-04-01), None

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