Deviation angle self compensating substantially achromatic...

Details Deviation angle self compensating substantially achromatic... Deviation angle self compensating substantially achromatic...

2006-10-31

2008-12-02

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

By polarized light examination

With birefringent element

C356S369000, C359S494010, C359S490020

Reexamination Certificate

active

07460230

ABSTRACT:
A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

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