Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1994-11-08
1996-04-16
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
With light attenuation
356354, G01B 1100
Patent
active
055088082
ABSTRACT:
A development sensor apparatus includes an optical system, a 0th-order light detection unit, a 1st-order light detection unit, a diffracted light ratio calculating unit, and an ellipsoidal mirror. The optical system radiates a laser beam to a predetermined development monitor point on a pattern surface of a master having an exposed pattern. The 0th-order light detection unit receives a 0th-order diffracted light component from the development monitor point. The 1st-order light detection unit receives reflected light of a 1st-order diffracted light component from the development monitor point. The diffracted light ratio calculating unit calculates a ratio of diffracted light amounts of the 0th- and 1st-order diffracted light components based on detection signals of the 0th- and 1st-order light detection units and outputs a development monitor signal. The ellipsoidal mirror is provided on an optical path of the 1st-order diffracted light component from the development monitor point and reflects the 1st-order diffracted light component from the development monitor point toward the 1st-order light detection unit.
REFERENCES:
patent: 4303341 (1981-12-01), Kleinknecht et al.
patent: 4330213 (1982-05-01), Kleinknecht et al.
patent: 4601576 (1986-07-01), Galbraith
patent: 4615620 (1986-10-01), Noguchi et al.
Yoshihiro Okino et al., "Mastering Process and Facilities Using Laser Beam for Optical Discs", National Technical Report, vol. 29, No. 5, Oct. 1983, pp. 752-764.
NEC Corporation
Pham Hoa Q.
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