Development processing device

Details Development processing device Development processing device

2008-01-08

2010-10-26

Mathews, Alan A (Department: 2882)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C430S313000, C118S300000

Reexamination Certificate

active

07819594

ABSTRACT:
A device includes a rotary base; an approach stage; a substrate holding table and a nozzle head. The substrate holding table holds the work by suction, and comes into intimate contact with the approach stage and the rotary base through first and second annular seal members to form a liquid storage space, respectively. When the suction holding and the intimate contact are released, the substrate becomes rotatable together with the rotary base and the approach stage.

REFERENCES:
patent: 7419316 (2008-09-01), Kitamura et al.
patent: 2003/0044731 (2003-03-01), Yoshihara et al.
patent: 2003/0077083 (2003-04-01), Yamamoto et al.
patent: 2003/0165756 (2003-09-01), Ono et al.
patent: 2004/0053147 (2004-03-01), Ito
patent: 2005-236189 (2005-09-01), None
Translation of JP 2005-236189 (dated Sep. 2, 2005).

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