Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Reexamination Certificate
2006-04-11
2006-04-11
Rutledge, D. (Department: 2851)
Photography
Fluid-treating apparatus
Fluid application to one side only of photographic medium
C396S611000, C396S627000, C430S311000, C430S322000, C118S052000
Reexamination Certificate
active
07025514
ABSTRACT:
A development apparatus for discharging a developer onto a surface of a semiconductor substrate (15) comprises a nozzle pipe (13) for supplying the developer, and a nozzle (14) having a shape of a spoon with a taper and discharging the developer supplied by the nozzle pipe onto the surface of the substrate. The nozzle sprays the developer onto the surface of the substrate at any spray angle under a low and constant pressure.
REFERENCES:
patent: 6376013 (2002-04-01), Rangarajan
patent: 07-176471 (1995-07-01), None
Ohta Yasuharu
Shimada Keizo
Oki Electric Industry Co. Ltd.
Rutledge D.
Takeuchi & Kubotera LLP
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