Developing method and apparatus

Details Developing method and apparatus Developing method and apparatus

2007-02-27

2007-02-27

Rutledge, D. (Department: 2851)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C355S027000, C430S030000, C430S399000

Reexamination Certificate

active

11476574

ABSTRACT:
In this developing method and apparatus, a concentration measuring unit 222 picks part of developing fluid in a blending tank 186 to measure the resist concentration by an absorption photometry and feeds the detected resist concentration to a control unit 240. The control unit 240 controls respective valves 210, 212, 216 of a TMAH concentrate solution 200, a solvent pipe 204 and a drain pipe 208 in a manner that the developing fluid in the blending tank 186 has a TMAH concentration corresponding to a measured resist-concentration value to accomplish a constant developing rate, performing component control of the developing fluid. The developing fluid transferred from the blending tank 186 to a supply tank 188 is fed to a developer nozzle DN in a developing section 126 through a developer pipe 224 owing to the drive of a pump 228. Accordingly, even if the developing fluid is reused in the developing process in multiple times, it is possible to make sure of the uniformity in development.

REFERENCES:
patent: 5223881 (1993-06-01), Nakagawa et al.
patent: 5945161 (1999-08-01), Hashimoto et al.
patent: 5965200 (1999-10-01), Tateyama et al.
patent: 6090205 (2000-07-01), Sakai et al.
patent: 6120945 (2000-09-01), Tanaka et al.
patent: 6302600 (2001-10-01), Nagase et al.
patent: 6569609 (2003-05-01), Timpe et al.
patent: 6588927 (2003-07-01), Nakagawa et al.
patent: 6752545 (2004-06-01), Nakagawa et al.
patent: 6969572 (2005-11-01), Tateyama et al.
patent: 7101646 (2006-09-01), Tateyama et al.
patent: 2002/0146251 (2002-10-01), Nakagawa et al.
patent: 2003/0096199 (2003-05-01), Nakagawa et al.
patent: 07-110580 (1995-04-01), None
patent: 8-45832 (1996-02-01), None
patent: 9-7939 (1997-01-01), None
patent: 09-269320 (1997-10-01), None
patent: 10-321517 (1998-12-01), None
patent: 2002-196503 (2002-07-01), None
patent: 447026 (2001-07-01), None

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