Developing method and apparatus

Details Developing method and apparatus Developing method and apparatus

2006-09-05

2006-09-05

Le, Hoa Van (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

C430S399000

Reexamination Certificate

active

07101646

ABSTRACT:
In this developing method and apparatus, a concentration measuring unit222picks part of developing fluid in a blending tank186to measure the resist concentration by an absorption photometry and feeds the detected resist concentration to a control unit240. The control unit240controls respective valves210, 212, 216of a TMAH concentrate solution200, a solvent pipe204and a drain pipe208in a manner that the developing fluid in the blending tank186has a TMAH concentration corresponding to a measured resist-concentration value to accomplish a constant developing rate, performing component control of the developing fluid. The developing fluid transferred from the blending tank186to a supply tank188is fed to a developer nozzle DN in a developing section126through a developer pipe224owing to the drive of a pump228. Accordingly, even if the developing fluid is reused in the developing process in multiple times, it is possible to make sure of the uniformity in development.

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