Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate
2005-11-29
2005-11-29
Schilling, Richard L. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Including control feature responsive to a test or measurement
C430S325000, C430S327000, C430S331000, C430S399000, C396S578000
Reexamination Certificate
active
06969572
ABSTRACT:
In this developing method and apparatus, a concentration measuring unit222picks part of developing fluid in a blending tank186to measure the resist concentration by an absorption photometry and feeds the detected resist concentration to a control unit240. The control unit240controls respective valves210, 212, 216of a TMAH concentrate solution200, a solvent pipe204and a drain pipe208in a manner that the developing fluid in the blending tank186has a TMAH concentration corresponding to a measured resist-concentration value to accomplish a constant developing rate, performing component control of the developing fluid. The developing fluid transferred from the blending tank186to a supply tank188is fed to a developer nozzle DN in a developing section126through a developer pipe224owing to the drive of a pump228. Accordingly, even if the developing fluid is reused in the developing process in multiple times, it is possible to make sure of the uniformity in development.
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Nomura Masafumi
Shinogi Taketora
Tateyama Kiyohisa
Schilling Richard L.
Tokyo Electron Limited
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