Developing apparatus, developing method, coating and...

Details Developing apparatus, developing method, coating and... Developing apparatus, developing method, coating and...

2008-04-18

2010-11-09

Fuller, Rodney E (Department: 2862)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C396S604000

Reexamination Certificate

active

07828488

ABSTRACT:
A developing apparatus includes two rotating members respectively having parallel horizontal axes of rotation and disposed longitudinally opposite to each other, a carrying passage forming mechanism extended between the rotating members to form a carrying passage, and capable of moving along an orbital path to carry a wafer supported thereon along the carrying passage, a sending-in transfer unit disposed at the upstream end of the carrying passage, a sending-out transfer unit disposed at the downstream end of the carrying passage, a developer pouring nozzle for pouring a developer onto the wafer, a cleaning nozzle for pouring a cleaning liquid onto the wafer, and a gas nozzle for blowing a gas against the wafer. The developer pouring nozzle, the cleaning nozzle and the gas nozzle are arranged in that order in a direction in which the wafer is carried along the carrying passage.

REFERENCES:
patent: 7241061 (2007-07-01), Akimoto et al.
patent: 2005/0271382 (2005-12-01), Ogata et al.
patent: 2006/0040051 (2006-02-01), Yamamoto et al.
patent: 2007/0065145 (2007-03-01), Kitamura
patent: 2008/0241403 (2008-10-01), Matsuoka et al.
patent: 2008/0268383 (2008-10-01), Matsuoka et al.
patent: 2005-210059 (2005-08-01), None
patent: 2006-60084 (2006-03-01), None

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