Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Reexamination Certificate
2007-12-04
2007-12-04
Donovan, Lincoln (Department: 2837)
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
C359S393000, C318S135000, C318S038000
Reexamination Certificate
active
10347305
ABSTRACT:
A developing apparatus is capable of moving a stage for supporting a substance to be developed from a detachable position to a developing area below a developing unit, and two-dimensional movement. The present developing apparatus includes a developing device, a first moving device movable in a direction of axis of ordinate and a second moving device movable in a direction of axis of abscissa, and a stage posture control device to control an inclined posture of the stage in order to hold a relative distance between the developing device and a developing area surface of the substance placed on the stage constant.
REFERENCES:
patent: 5357366 (1994-10-01), Marchlenski
patent: 6002740 (1999-12-01), Cerrina et al.
patent: 6583597 (2003-06-01), Tanaka et al.
patent: 8-241127 (1996-09-01), None
patent: 2001-286296 (2001-10-01), None
Brandt Michael
Donovan Lincoln
Kanesaka Manabu
Nisca Corporation
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