Developing apparatus and developing method

Details Developing apparatus and developing method Developing apparatus and developing method

2005-07-13

2010-06-22

Fuller, Rodney E (Department: 2862)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C396S575000

Reexamination Certificate

active

07740410

ABSTRACT:
A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle.

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Notification of Transmittal of Translation of the International preliminary Report on Patentability (Form PCT/IB/338) in connection with PCT/JP2005/012957, dated Jan. 2004.
International Preliminary Report on Patentability (Form PCT/IB/373) in connection with PCT/JP2005/012957, dated Jan. 2004.
Translation of Written Opinion of the International Searching Authority (Form PCT/ISA/237) in connection with PCT/JP2005/012957, dated Jan. 2004.
Japanese Office Action issued on Feb. 3, 2009 for Japanese Patent Application No. 2004-208506 with English translation.

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