Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Reexamination Certificate
2005-05-17
2005-05-17
Mathews, Alan (Department: 2851)
Photography
Fluid-treating apparatus
Fluid application to one side only of photographic medium
C396S571000, C118S052000, C427S240000
Reexamination Certificate
active
06893172
ABSTRACT:
A developing apparatus which enables the time necessary for a development reaction to be shortened and permits uniform development includes a chuck device with a support portion whose top surface is a horizontal surface and a spinner disposed in the middle of this support portion. The support portion and the spinner are provided within an antiscattering cup. A groove which vacuum adsorbs a substrate W to be treated is formed on the top surface of the spinner, a pipe which forms a circulation path is disposed within the groove formed on the top surface of the support portion, and a cleaning nozzle which cleans a developing solution which has flown behind the rear surface of the substrate W is disposed in a position which is nearest to the inside diameter of the top surface of the support portion. On the other hand, in a nozzle device, a spray nozzle is attached to a horizontally reciprocating arm via a columnar support. A developing solution pipe and an air supply pipe are inserted into this spray nozzle and a temperature-regulated developing solution from the developing solution supply pipe is spouted in mist form from the bottom end of the spray nozzle.
REFERENCES:
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Inao Yoshihiro
Nakamura Akihiko
Blackman William D.
Carrier Joseph P.
Carrier Blackman & Associates P.C.
Mathews Alan
Tokyo Ohka Kogyo Co. Ltd.
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