Developing apparatus and developing method

Details Developing apparatus and developing method Developing apparatus and developing method

2011-04-12

2011-04-12

LaBalle, Clayton E (Department: 2862)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C396S564000, C396S582000

Reexamination Certificate

active

07922405

ABSTRACT:
A joint nozzle that delivers a developer, a rinsing liquid and nitrogen gas is disposed adjacent the spin center of a substrate in plan view. A controller operates electromagnetic switch valves to continue supply of the developer, while spinning the substrate, in a developing process, and to start supply of the rinsing liquid in a rinsing process, immediately after the supply of the developer ends, thereby achieving a shortened period of the developing process. A switching is made to a drying process by starting supply of the nitrogen gas immediately after completion of the rinsing process. Thus, even if the substrate has a large angle of contact, formation of droplets of the rinsing liquid is inhibited to prevent post-develop defects.

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Machine translation of JP 07-135137A.
Office Action dated May 8, 2009 issued in corresponding Chinese Patent Application No. 200710006223.9.
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Taiwan Office Action dated Sep. 9, 2010 in connection with corresponding Taiwanese Patent Application No. 096104202.

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