Developing apparatus

Details Developing apparatus Developing apparatus

1988-04-22

1989-08-08

Mathews, A. A.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

354320, 134153, 134198, G03D 302

Patent

active

048557757

ABSTRACT:
In a developing apparatus according to the present invention, a supply path of a developing solution is formed in a cup member which constitutes a dip tank of the developing solution so that the spraying pressure of the developing solution is not directly applied to an object to be processed. As a result, uniform, high-quality images can be developed on an entire area of the object.

REFERENCES:
patent: 4161356 (1979-07-01), Griffen et al.
patent: 4429983 (1984-02-01), Cortellino et al.
patent: 4519846 (1985-05-01), Aigo
patent: 4557785 (1985-10-01), Ohkuma
patent: 4682615 (1987-07-01), Burkman et al.
patent: 4745422 (1988-05-01), Matsuoko et al.
patent: 4753258 (1988-06-01), Seiichiro
patent: 4755844 (1988-07-01), Tsuchiya et al.
patent: 4788994 (1988-12-01), Shinbara

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