Developer waste liquid regenerating apparatus and method

Details Developer waste liquid regenerating apparatus and method Developer waste liquid regenerating apparatus and method

2005-04-05

2005-04-05

Fortuna, Ana (Department: 1723)

Liquid purification or separation

Processes

Liquid/liquid solvent or colloidal extraction or diffusing...

C210S651000, C430S399000, C430S400000

Reexamination Certificate

active

06875359

ABSTRACT:
A developer liquid regenerating system is provided with a storage tank storing a TAAH (such as TMAH)- and photoresist-containing developer waste liquid, first separating means with NF membrane, connected to the waste liquid storage tank through conduits, a storage tank connected to the first separating means through a conduit, and second separating means with NF membrane, connected to the storage tank through conduits. The developer liquid regenerating system is also connected to a developing apparatus through a conduit connected to the storage tank, and to a developer liquid control/supply apparatus through a conduit connected to the storage tank.

REFERENCES:
patent: 5607592 (1997-03-01), Bernard et al.
patent: 6083670 (2000-07-01), Sugawara et al.
patent: 6117315 (2000-09-01), Masson
patent: 6187519 (2001-02-01), Sugawara
patent: 6723247 (2004-04-01), Martin
patent: Kokai Hei 5-40345 (1993-02-01), None
patent: 8-62852 (1996-03-01), None
patent: 11-192481 (1999-07-01), None
patent: 11-262765 (1999-09-01), None

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