Compositions: ceramic – Ceramic compositions – Glass compositions – compositions containing glass other than...
Reexamination Certificate
2006-10-19
2009-12-22
Group, Karl E (Department: 1793)
Compositions: ceramic
Ceramic compositions
Glass compositions, compositions containing glass other than...
C065S017400, C065S030100, C065S032500, C065S157000
Reexamination Certificate
active
07635658
ABSTRACT:
What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.
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Bookbinder Dana Craig
Fiacco Richard Michael
Neukirch Ulrich Wilhelm Heinz
Chen Siwen
Group Karl E
Santandrea Robert P.
Wiese Noah S
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