Deuterium-treated semiconductor devices

Details Deuterium-treated semiconductor devices Deuterium-treated semiconductor devices

1996-01-16

1999-02-16

Hardy, David B.

Active solid-state devices (e.g., transistors, solid-state diode

With specified dopant

257629, 438 38, H01L 2976

Patent

active

058723870

ABSTRACT:
Described are preferred processes for conditioning semiconductor devices with deuterium to improve operating characteristics and decrease depassivation which occurs during the course of device operation. Also described are semiconductor devices which can be prepared by such processes.

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