Determining the position of a semiconductor substrate on a...

Details Determining the position of a semiconductor substrate on a... Determining the position of a semiconductor substrate on a...

2004-08-26

2010-06-29

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Position or displacement

C356S622000

Reexamination Certificate

active

07746482

ABSTRACT:
A device for determining the position of a semiconductor substrate on a rotation device having a rotational axis, including a direction of rotation detecting unit for determining the rotational state of the rotation device, and also including at least one light source and at least one receiver which is photo-sensitive to the light from the light source, wherein at least one light beam emitted by the light source is directed toward the edge of the semiconductor substrate and passes said edge to at least a partial extent. The light of the light beam which has passed to at least a partial extent is then detected at least partially by the receiver.

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