Determining surface properties with angle offset correction

Details Determining surface properties with angle offset correction Determining surface properties with angle offset correction

2007-07-06

2010-11-16

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237200

Reexamination Certificate

active

07834991

ABSTRACT:
An apparatus for determining surface properties, comprises at least a first radiation device which emits radiation onto a surface to be analyzed, at least a first radiation detector device which receives at least part of the radiation emitted by the at least one radiation device and then scattered or reflected by the surface and outputs at least a first measurement signal which is characteristic of the reflected or scattered radiation, and at least a further radiation detector device which receives at least part of the radiation emitted by the at least one radiation device and then scattered or reflected by a surface and outputs at least a second measurement signal which is characteristic of the reflected or scattered radiation.

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Japanese Official Action, dated May 12, 2009, (3 pgs).
JP OA Translation, Jan. 9, 2009, (7 pages).

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