Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-11-21
2006-11-21
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100, C118S728000, C118S730000, C438S758000, C438S764000, C438S784000
Reexamination Certificate
active
07138607
ABSTRACT:
The invention is a method of determining a set temperature profile of a method of controlling respective substrate temperatures of plurality of groups in accordance with respective corresponding set temperature profiles. The invention includes a first heat processing step of controlling respective substrate temperatures of a plurality of groups in accordance with respective predetermined provisional set temperature profiles for first-batch substrates that are classified into the plurality of groups, and of introducing a process gas to conduct a heat process to form films on the substrates; a first film-thickness measuring step of measuring a thickness of the films formed on the substrates; and a first set-temperature-profile amending step of respectively amending the provisional set temperature profiles based on the measured thickness, in such a manner that a thickness of films formed during a heat process is substantially the same between the plurality of groups.
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Sakamoto Koichi
Suzuki Fujio
Wang Wenling
Yasuhara Moyuru
Fuqua Shawntina
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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