Determination of true electrical channel length of surface FET

Details Determination of true electrical channel length of surface FET Determination of true electrical channel length of surface FET

1982-06-09

1984-06-05

Tokar, Michael J.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

Beam of atomic particles

324158T, 357 85, G01N 2700

Patent

active

044531273

ABSTRACT:
The true electrical channel length of a surface FET is determined by obtaining individual electron-beam-induced-current signal traces of source and drain junctions, thus eliminating the coupling effect of the two junctions. A reliable mask is formed as a function of the measured peak-to-peak distance subtracted by the depletion width.

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