Measuring and testing – Gas analysis – Moisture content or vapor pressure
Patent
1995-01-13
1996-07-09
Williams, Hezron E.
Measuring and testing
Gas analysis
Moisture content or vapor pressure
73 2901, 73 2902, 7333505, 338 34, 374 28, 324663, 324689, 340602, 340580, G01N 2712, G01W 100, H01L 700
Patent
active
055333931
ABSTRACT:
A microsensor system for determining water vapor content of the ambient atmosphere that uses a thin film suspended ceramic diaphragm structure featuring an embedded, patterned thin film heater, temperature sensor and an external film of an hygroscopic salt stabilized in a water-insoluble, crosslinked polymer matrix and contacting a pair of patterned electrodes which are proximate to the heater. The heater controls a selected electrical parameter of the salt to a fixed, predetermined value, as determined by its electrical characteristics. The dew point of the atmosphere is determined based on the dynamic relation with the salt dehydration temperature.
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Bonne Ulrich
Honda Nobuaki
Kubisiak David
Ohnstein Thomas R.
Honeywell Inc.
Wiggins J. David
Williams Hezron E.
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