Determination of center of focus by cross-section analysis

Details Determination of center of focus by cross-section analysis Determination of center of focus by cross-section analysis

2006-09-19

2006-09-19

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Lens or reflective image former testing

Reexamination Certificate

active

07110099

ABSTRACT:
Methods for determination of parameters in lithographic devices and applications by cross-section analysis of scatterometry models, including determination of center of focus in lithography devices and applications. Control methods are provided for process control of center of focus in lithography devices utilizing cross-section analysis.

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